Mks Astron 2l — Manual

MKS Astron 2L (also known as the AX7651 or AX7657) is a Remote Plasma Source (RPS) primarily used in semiconductor manufacturing to clean cap C cap V cap D (Chemical Vapour Deposition) and cap F cap P cap D

Ozone is a powerful oxidant. Before powering on the unit, ensure the following are in place:

"The turntable stopped spinning."

Gas Inlet:

According to the technical manual, setup follows these specific steps: 1. Plumbing Connections Connect ultra-high purity (UHP) Oxygen. Gas Outlet: Use stainless steel compression fittings. mks astron 2l manual

This article aggregates everything you would find in the official manual, including setup procedures, pinout configurations, degassing protocols, and common fault fixes.

Overall recommendation The MKS Astron 2L manual is a strong, practical resource that balances accessibility with technical completeness. It should serve well as both a quick-reference guide during field setup and a detailed reference for maintenance and troubleshooting. MKS Astron 2L (also known as the AX7651

The manual describes a sophisticated "transformer-type" discharge mechanism:

Over time, adsorbed gases on the grid can cause outgassing, leading to false high-pressure readings. The manual details two degas methods: Gas Outlet: Use stainless steel compression fittings

The MKS Astron 2L manual outlines the device's key components, including the sensor, electronics, and valve. The sensor measures the gas flow rate using a thermal mass flow measurement technique, while the electronics process the sensor signal and generate a control output. The valve, which is typically a proportional solenoid valve, regulates the gas flow rate based on the control output.